Anti-Stiction Coatings for MEMS Switches Based on Quantitative Evaluation of Adhesion Forces
نویسندگان
چکیده
منابع مشابه
Alkene Based Monolayer Films as Anti-stiction Coatings for Polysilicon Mems
This paper describes a new class of anti-stiction coatings for silicon MEMS that is based on the free radical reaction of a primary alkene (e.g., 1-octadecene, C16H33CH=CH2) with hydrogen terminated silicon [1,2]. The new monolayer coating has several key advantages over the previously reported octadecyltrichlorosilane (OTS) and 1H,1H,2H,2Hperfluorodecyltrichlorosilane (FDTS) based self-assembl...
متن کاملSelf-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments
Despite significant advances in surface micromachining technology, stiction remains a key problem, severely limiting the realization Ž . and reliability of many micro-electro-mechanical systems MEMS devices. In this article, we focus on self-assembled monolayers as release and anti-stiction coatings for MEMS. Their formation mechanism, the microstructure coating process, and the characteristics...
متن کاملapplication of upfc based on svpwm for power quality improvement
در سالهای اخیر،اختلالات کیفیت توان مهمترین موضوع می باشد که محققان زیادی را برای پیدا کردن راه حلی برای حل آن علاقه مند ساخته است.امروزه کیفیت توان در سیستم قدرت برای مراکز صنعتی،تجاری وکاربردهای بیمارستانی مسئله مهمی می باشد.مشکل ولتاژمثل شرایط افت ولتاژواضافه جریان ناشی از اتصال کوتاه مدار یا وقوع خطا در سیستم بیشتر مورد توجه می باشد. برای مطالعه افت ولتاژ واضافه جریان،محققان زیادی کار کرده ...
15 صفحه اولRobust Lyapunov-based Control of MEMS Optical Switches
In this paper, a robust PID control scheme is proposed for Micro-Electro-Mechanical-Systems (MEMS) optical switches. The proposed approach is designed in a way which solves two challenging and important problems. The first one is successful reference tracking and the second is mitigating the system nonlinearities. The overall system composed of nonlinear MEMS dynamics and the PID controller is ...
متن کاملRobust Lyapunov-based Control of MEMS Optical Switches
In this paper, a robust PID control scheme is proposed for Micro-Electro-Mechanical-Systems (MEMS) optical switches. The proposed approach is designed in a way which solves two challenging and important problems. The first one is successful reference tracking and the second is mitigating the system nonlinearities. The overall system composed of nonlinear MEMS dynamics and the PID controller is ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Japan Institute of Electronics Packaging
سال: 2012
ISSN: 1343-9677,1884-121X
DOI: 10.5104/jiep.15.49